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21 publications found under ""

ISO 14644-1:2015 [Current]

Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration

ISO 14644-10:2022 [Current]

Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination

ISO 14644-12:2018 [Current]

Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

ISO 14644-13:2017 [Current]

Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications

ISO 14644-14:2016 [Current]

Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration

ISO 14644-15:2017 [Current]

Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

ISO 14644-16:2019 [Current]

Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices

ISO 14644-17:2021 [Current]

Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications

ISO 14644-18:2023 [Current]

Cleanrooms and associated controlled environments — Part 18: Assessment of suitability of consumables

ISO 14644-2:2015 [Current]

Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

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