ISO 25178-604:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

OVERVIEW

ISO 25178-604:2013 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

COMMENTS

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PRODUCT DETAILS

Status Withdrawn - 06 Jan 2026
Edition 2013
No. of Pages 41
ICS Classification 17.040.20 Properties of surfaces
Committee ISO/TC 213
Available for Purchase For sale in Singapore only
Adoption ISO