ISO/TS 22933:2022
Surface chemical analysis — Secondary ion mass spectrometry — Method for the measurement of mass resolution in SIMS
OVERVIEW
This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
COMMENTS
-
PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2022 |
| No. of Pages | 15 |
| ICS Classification | 71.040.40 Chemical analysis |
| Committee | ISO/TC 201/SC 6 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |