ISO 14644-8:2022

Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)

OVERVIEW

This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 100 g/m3 and 10-12 g/m3 under cleanroom operational conditions.

This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.

It is not the intention of this document to describe the nature of air chemical contaminants.

This document does not give a classification of surface chemical contamination.

COMMENTS

-

PRODUCT DETAILS

Status Current
Edition 2022
No. of Pages 22
ICS Classification 13.040.35 Cleanrooms and associated controlled environments
Committee ISO/TC 209
Available for Purchase For sale in Singapore only
Adoption ISO