ISO 25164:2026
Physical vapor deposition coatings — Magnetron sputtering deposition of TiAlSiN thin films — Specification
OVERVIEW
This document specifies the technical requirements for TiAlSiN thin films deposited by magnetron sputtering.
This document is also applicable to the deposition of TiN, TiAlN or TiSiN thin films.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2026 |
| No. of Pages | 6 |
| ICS Classification | 25.220.40 Metallic coatings |
| Committee | ISO/TC 107/SC 9 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO : 0 |