ISO 23131-3:2026
Ellipsometry — Part 3: Transparent single layer model
OVERVIEW
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part e1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2026 |
| No. of Pages | 29 |
| ICS Classification | 17.020 Metrology and measurement in general |
| Committee | ISO/TC 107 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO : 0 |