ISO 23131:2021
Ellipsometry — Principles
OVERVIEW
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2021 |
| No. of Pages | 15 |
| ICS Classification | 17.020 Metrology and measurement in general |
| Committee | ISO/TC 107 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |