IEC 62374:2007
Semiconductor devices - Time dependent dielectric breakdown (TDDB) test for gate dielectric films
OVERVIEW
Provides a test method of Time Dependent Dielectric Breakdown (TDDB) for gate dielectric films on semiconductor devices and a product lifetime estimation method of TDDB failure
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2007 |
| No. of Pages | 43 |
| ICS Classification | 31.080.99 Other semiconductor devices |
| Committee | TC 47 |
| Available for Purchase | For sale in Singapore only |
| Adoption | IEC |