ISO 24639:2022
Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
OVERVIEW
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
COMMENTS
-
PRODUCT DETAILS
Status | Current |
---|---|
Edition | 2022 |
No. of Pages | 15 |
ICS Classification | 71.040.50 Physicochemical methods of analysis |
Committee | ISO/TC 202/SC 3 |
Available for Purchase | For sale in Singapore only |
Adoption | ISO |