ISO 19606:2024

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

OVERVIEW

This document specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy. This method applies to surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, Rsm, in the range of about 0,04 µm to 2,5 µm.

COMMENTS

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PRODUCT DETAILS

Status Current
Edition 2024
No. of Pages 24
ICS Classification 81.060.30 Advanced ceramics
Committee ISO/TC 206
Available for Purchase For sale in Singapore only
Adoption ISO : 0