ISO 25178-603:2025
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
OVERVIEW
This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2025 |
| No. of Pages | 18 |
| ICS Classification | 17.040.20 Properties of surfaces |
| Committee | ISO/TC 213 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO : 0 |