IEC 62047-1:2005
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
OVERVIEW
This part of IEC 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
COMMENTS
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PRODUCT DETAILS
| Status | Withdrawn - 02 Jan 2026 |
|---|---|
| Edition | 2005 |
| No. of Pages | 49 |
| ICS Classification | 31.080.99 Other semiconductor devices |
| Committee | TC 47/SC 47F |
| Available for Purchase | For sale in Singapore only |
| Adoption | IEC : 0 |