ISO/TR 19319:2013
Surface chemical analysis — Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
OVERVIEW
ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2013 |
| No. of Pages | 116 |
| ICS Classification | 71.040.40 Chemical analysis |
| Committee | ISO/TC 201/SC 2 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |