ISO 18115-3:2022
Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis
OVERVIEW
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2022 |
| No. of Pages | 35 |
| ICS Classification | 71.040.40 Chemical analysis 01.040.71 Chemical technology (Vocabularies) |
| Committee | ISO/TC 201/SC 1 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |