ISO 3530:1979

Vacuum technology — Mass-spectrometer-type leak-detector calibration

OVERVIEW

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.

COMMENTS

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PRODUCT DETAILS

Status Current
Edition 1979
No. of Pages 10
ICS Classification 23.160 Vacuum technology
Committee ISO/TC 135/SC 6
Available for Purchase For sale in Singapore only
Adoption ISO