ISO TS 80004-8:2020

Nanotechnologies - Vocabulary - Part 8: Nanomanufacturing processes

OVERVIEW

This document defines terms related to nanomanufacturing processes in the field of nanotechnologies.
All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales.
There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document.
Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.

COMMENTS

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PRODUCT DETAILS

Status Current
Edition 2020
No. of Pages 31
ICS Classification 07.120 Nanotechnologies
07.030 Physics. Chemistry
01.040.07 Natural and applied sciences (Vocabularies)
Committee TC 113
Available for Purchase For sale in Singapore only
Adoption IEC