ISO 25178-603:2013
Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
OVERVIEW
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
COMMENTS
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PRODUCT DETAILS
| Status | Withdrawn - 06 Jan 2026 |
|---|---|
| Edition | 2013 |
| No. of Pages | 28 |
| ICS Classification | 17.040.20 Properties of surfaces |
| Committee | ISO/TC 213 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |