ISO 25178-603:2013

Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

OVERVIEW

ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

COMMENTS

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PRODUCT DETAILS

Status Withdrawn - 06 Jan 2026
Edition 2013
No. of Pages 28
ICS Classification 17.040.20 Properties of surfaces
Committee ISO/TC 213
Available for Purchase For sale in Singapore only
Adoption ISO