IEC TS 62876-3-2:2026
Nanomanufacturing - Reliability and durability assessment - Part 3-2: Graphene - Ellipsometry measurement of graphene
OVERVIEW
IEC TS 62876-3-2:2026 which is a Technical Specification, establishes a standardized method to determine
• volume fraction
for graphene by
• ellipsometry.
Thickness/composition measurements are evaluated by ellipsometry before and after the stability test. By model calculation, the volume fraction of graphene can be evaluated. Since the test method is non-destructive, it can be used to assess the reliability and durability of graphene films on production lines.
• For graphene-capped copper for Cu interconnects in a semiconductor engineering, for example, the reliability and durability of the capping layer are evaluated.
• Gas sensors, gas barriers, transparent electrodes for solar cells, etc. are being researched and developed.
• This method is useful for non-destructive and quantitative evaluation of the volume fraction of graphene to assess the reliability and durability.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2026 |
| No. of Pages | 18 |
| ICS Classification | 07.120 Nanotechnologies |
| Committee | TC 113 |
| Available for Purchase | For sale in Singapore only |
| Adoption | IEC : 0 |