IEC 62047-1:2016

Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions

OVERVIEW

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:

a) removal of ten terms;

b) revision of twelve terms;

c) addition of sixteen new terms.

COMMENTS

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PRODUCT DETAILS

Status Current
Edition 2016
No. of Pages 66
ICS Classification 31.080.99 Other semiconductor devices
Committee TC 47/SC 47F
Available for Purchase For sale in Singapore only
Adoption IEC