ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
OVERVIEW
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2013 |
| No. of Pages | 46 |
| ICS Classification | 71.040.40 Chemical analysis |
| Committee | ISO/TC 201/SC 7 |
| Available for Purchase | For sale in Singapore only |
| Adoption | ISO |