IEC 62047-44:2024
Semiconductor devices - Micro-electromechanical devices - Part 44: Test methods for dynamic performances of MEMS resonant electric-field-sensitive devices
OVERVIEW
IEC 62047-44:2024 describes terminology, definitions and test methods that are used to evaluate and determine the dynamic performance of MEMS (Micro-Electromechanical Systems) resonant electric-field-sensitive devices. It also specifies sample requirements and test equipment for dynamic performances of MEMS resonant electric-field-sensitive devices. The statements made in this document are also applicable to MEMS resonant electric-field-sensitive devices with various driving mechanisms such as electrostatic, electrothermal, electromagnetic, piezoelectric, etc.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2024 |
| No. of Pages | 19 |
| ICS Classification | 31.080.99 Other semiconductor devices |
| Committee | TC 47/SC 47F |
| Available for Purchase | For sale in Singapore only |
| Adoption | IEC : 0 |