ISO 25178-607:2019

Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments

OVERVIEW

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

COMMENTS

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PRODUCT DETAILS

Status Current
Edition 2019
No. of Pages 21
ICS Classification 17.040.20 Properties of surfaces
Committee ISO/TC 213
Available for Purchase For sale in Singapore only
Adoption ISO