FAQs
IEC 62047-9:2011
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding...
IEC 62047-8:2011
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for...
IEC 62047-7:2011
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer...
IEC 62047-6:2009
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods...
IEC 62047-5:2011
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
IEC 62047-4:2008
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
IEC 62047-3:2006
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece...
IEC 62047-22:2014
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile...
IEC 62047-21:2014
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's...
