IEC 60204-33:2009
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment
OVERVIEW
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
COMMENTS
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PRODUCT DETAILS
| Status | Current |
|---|---|
| Edition | 2009 |
| No. of Pages | 247 |
| ICS Classification | 29.020 Electrical engineering in general 25.040.30 Industrial robots. Manipulators 13.110 Safety of machinery |
| Committee | TC 44 |
| Available for Purchase | For sale in Singapore only |
| Adoption | IEC |